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spiedigitallibrary.org
Suspended InGaAs membrane waveguide devices with subwavelength gratings and photonic crystal structures for ammonia sensing at λ=6.15μm (Conference Presentation)
Fully suspended InGaAs waveguide devices with holey photonic crystal waveguides (HPCWs) and Sub-wavelength waveguides (SWWs) are designed and fabricated for mid-infrared sensing at λ=6.15µm in the low index contrast InGaAs-InP platform. We experimentally detect 5 ppm ammonia in 1 mm long suspended HPCW and 3 mm long suspended SWW with ...
Mar 10, 2020
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